Microelectronics

The ceramics lab is the heart of the development of new ceramic and composite materials for electronics components. The development of materials can begin from raw materials in powder form and end up as a solid bulk or as a composite in form of foam, paste or ink. The most commonly used methods are sintering,

hot-pressing, inject moulding, extrusion and printing (3D, inkjet, screen and

stencil printing). The material samples can be realized in form of discs, sheets, rods and rings (even more complex forms with 3D-printing). For finalizing and

polishing the material samples diamond saw, grinding and lasering can be used.

Equipment include:

• Furnaces (20 - 250°C, 800 - 1600 °C)
• Mills
• Diamond saw
• Grinder & polishing plates
• Temperature controlled uniaxial press
• Printers
• Moulds & casting equipment

If you are interested of co-operation with the lab premises, please contact Antti Paavola (antti.paavola@oulu.fi).

Timelapse from Ceramics laboratory

Detailed list of equipment:

Sintering furnaces (800 - 1600 °C):

• Nabertherm HT 08/16, max 1600 °C
• Nabertherm HTC 08/16, max 1600 °C
• Nabertherm LS 25/13, max 1300 °C
• Nabertherm N7, max 1100 °C
• Nabertherm N 60/85A, max 850 °C

Drying furnaces:

• 2x Memmert, max 300 °C

Mills:

• Fritsch, Pulverisette 6, planetary mono mill <5 mm - <1 µm
• WAB, Dyno -Mill, Agitator Bead Mill, submicron particles

Diamond saw:

• Buehler, IsoMet 4000

Grinder & polishing equipment:

• Struers TegraPol-25 with TegraForce-5 & TegraDoser-5
• Struers, DAP 2
• Buehler, MetaServ 250
• Joisten&KettenBaum GmbH, LSL2000

Temperature controlled uniaxial press:

• P/O/Weber GmbH, TRG 3, max 500 °C, N
• "Amberla 2000"

Extruder:

• Thermo, HAAKE Minilab

Inject molding:

• Thermo, HAAKE Minijet

Tape casting:

• Casting setup for 25 µm - 300 µm green tape thicknesses

3D-printers:

• LeapFrog, Creatr, filament 3D printer, incl. custom made paste extruder option
• MakerBot, Replicator 2X, filament 3D printer
• Formlabs, Form 2, Stereolithography (SLA) 3D printer

Ink-jet printers:

• Fujifilm, Dimatix DMP 2800

The chemistry laboratory supports our material development for novel electronics devices. The laboratory is furnished with typical lab setup and wide range of

labware is available. Commonly used methods are synthetizing, centrifugation,

filtering and flushes. Commonly used analyses are also available. The lab

infrastructure also includes tape casting equipment, tube furnaces and rheometer.

Equipment include:

• Fume hoods
• Pressure reactor
• Scales
• Drying furnaces
• Rheometer
• Tape casting

If you are interested of co-operation with the lab premises, please contact Antti Paavola (antti.paavola@oulu.fi).

The cell lab of the Microelectronics Research Unit was designed to allow the

evaluation of the cellular response to various nanomaterial-based scaffolds and templates. This lab has all the required equipment to grow different mammalian cell types on various substrates (e.g. hydrogels, 3D matrices, pillars) as well as provide physical stimulation during cell culture period. The lab is also equipped for basic cell response evaluation (e.g. immunostaining, PCR and gel electrophoresis).

Equipment include:

• Cell culture hood
• Fume hood
• CO2 incubator
• Autoclave
• Cell counting device
• Inverted microscope for cell culture use
• PCR equipment

If you are interested of co-operation with the lab premises, please contact Gabriela Lorite (gabrieal.lorite@oulu.fi).

Detailed list of equipment:

Cell culture equipment:

• Cell culture hood: Kojair Biowizard Platinum
• Incubator: HERAcell VIOS 160i CO2 incubator
• Cell storage: BioCane 20 Nitrogen Tank
• Cell counter: Automated cell counter Eve

Microscopy:

• Inverted microscope: Zeiss PrimoVert
• Fluorscence microscope: Leica DM4B with DAPI, GFP and Y3 filters

Molecular Biology:

• Thermocycler : UNO96 gradient
• Power source : PerfectBlue, high current
• Horizontal gel electrophoresis system : PerfectBlue Mini L
• Gel documentation system VWR Basic with 470nm transilluminator

Other equipment:

• Fume hood : Fanison
• Autoclave : Tuttnauer 2840ELCG-D
• Magnet : up to 1 T
• Laser : JDS Uniphase - 1125
• Centrifuge : Mega Star 600

The material characterization infrastructure allows measurement of electronics materials for full scale of properties. Typical electric properties that are measured are dielectric and magnetic properties (up to 20 GHz) and piezoelectric properties for bulk and thin film materials. Also mechanical, thermal and optical properties can be characterized with our equipment. For more detailed material

characterization, we have two Atomic Force Microscopes (AFM) and X-ray

diffractomerer (XRD).

Equipment include:

• BRUKER D8 DISCOVER XRD Equipment
• NETZSCH DIL402PC Dilatometer
• NETZSCH STA449F3 TGA/DSC
• AGILENT E4991A Impedance/ Materials analyzer
• Network Analyzers up to 50 GHz
• Gas mixing unit
• Optical vibrometers
• Temperature chambers
• Oscilloscopes, multimeters etc.

If you are interested of co-operation with the lab premises, please contact Antti Paavola (antti.paavola@oulu.fi).

The component characterization infrastructure allows measurement of electronic devices under various environments. Electronic components can be measured from low to high voltage, and from frequencies from DC up to 50 GHz. Sensors can be measured depending on their sensing capability. For example, gas sensors can be characterised for their sensitivity for various gases with gas mixing system, and mechanical movement can be produced from high low frequency forces to high frequency vibration. In addition, device can be studied for the reliability with thermal cycling and other stresses.

Equipment include:

• LCRs up to 3 GHz
• Network Analyzers up to 50 GHz
• Gas mixing unit
• Optical vibrometers
• Temperature chambers
• Oscilloscopes, multimeters etc.

If you are interested of co-operation with the lab premises, please contact Antti Paavola (antti.paavola@oulu.fi).

Electronics materials processing facilities

• ACXYS ULS Atmospheric pressure plasma system
• FRITSCH Pulverisette 6 Planetary mill
• RETSCH Ball mill
• RETSCH Grinder
• RETSCH Vibro sieve unit
• P O WEBER PW 20 HS Hotpress
• BUNGARD RPM 210 Multilayer press
• ERWEKA AR400 Triple roll mill
• PASCALL Triple roll mill
• PARR 4525 Autoclave system
• HAAKE MiniLab Micro compounder extruder
• HAAKE MiniJet Injection molding system
• SIKAMA Falcon 5C Reflow furnace
• WAB ResearchLab Nano mill
• CARBOLITE STF15/75 Tube furnace
• IKA RV10 vaporizer/distiller
• HETTICH Universal 320 Centrifuge
• NABERTHERM Sintering ovens
• HERAEUS Test oven
• MEMMERT Drying cabinets
• EKRA XH STS Screen-printer
• FUJI DIMATIX DPM-2831 Material printer
• BUEHLER ISOMET 4000 Precision saw
• BUEHLER METASERV 250 Polisher
• STRUERS TegraPol 25 Polisher
• DIAMOND SCRIBER RV-127
• STRUERS EPOVAC Mounting equipment
• JOISTEN&KETTENBAUM Lapping Machine
• SONICS Vibra-cell Ultrasonic processor
• PTC VF-1000 Via filler
• PTC IL-4080 Isostatic laminator
• FINNSONIC Ultrasonic baths
• FORMLABS Form2 3D printer
• MARKERBOT Replicator 2X 3D printer
• LEAPFROG 3D printer
• CARBOLITE GERO Tube furnace-systems for nanomaterial researching
• THERMOLYNE Tube furnace-systems for nanotube synthesis
• UNICAST 2000 Laboratory Tape Caster

Materials characterization equipment

• VEECO Dimension 3100 AFM system
• FINETECH FINEPLACER 145 PICO Flip chip bonder
• WENTWORTH Probe station
• ERSASCOPE Inspection System 3000 microscope
• LEITZ ERGOLUX Optical Microscope
• PRINCETON Versastat3 Potentiostat
• GASMET DX4040 Gas analyzer
• CUSTOMIZED flexible gas measuring system
• PALAS RBG1000 Solid particle disperser
• OLYMPUS BX51 Microscope with camera
• FEINFOCUS X-Ray System FXS-160.40
• SONOSCAN 9000 Acoustic microscope
• LPKF ProtoLaserU3 Laser machining unit
• BRUKER NanoScope V Scanning Probe Microscope
• SCHRODINGER's SHARPENER SS02 Tip fabrication equipment
• HAAKE MARS 40 Rheometer
• MALVERM Zetasizer Nano ZSP Zetapotentio equipment
• BRUKER D8 DISCOVER XRD Equipment
• PRECISA Precision weighing balances
• ABB IE3 based vibration environment emulation system
• VIBRATION Isolated measurement facilities
• NETZSCH DIL402PC Dilatometer
• NETZSCH STA449F3 TGA/DSC
• ANTER Flashline 3000 Thermal diffusivity system
• FLIR B60 Thermal camera
• RADIANT P-HVA10 Precision material analyzer
• RADIANT RTV6000HVS, Bulk ceramic Device, Nonlinear Thin Film and Ferroelectric Test System
• CIE DES SENSEURS OPTIQUES, INV 89-2 Laser interferometer displacement measurement system
• EG & G Princeton Two phase lock-in amplifier 5210
• AGILENT E4991A Impedance/ Materials analyzer
• HP 3577A Network analyzer
• AGILENT 8410C Network Analyzer
• CASCADE RF-1 Probe station
• AGILENT 34970A Data logger
• AGILENT 4284A Precision LCR meters
• AGILENT E4445A Spectrum analyzer
• AGILENT 4395A Network\spectrum\impedance analyzer
• AGILENT 16008B Resistivity cell
• KEYSIGHT E4982A Precision LCR meter
• KEYSIGHT E4980AL Precision LCR meter
• KEYSIGHT InfiniiVision MSOX3024T oscilloscopes
• FLUKE Hydra 2635A Data loggers
• KEITHLEY 2450 Sourcemeter
• KEITHLEY 2636A Dual sourcemeter
• KEITHLEY 2604B Dual sourcemeter
• KEITHLEY 263 Calibrator/Source
• KEITHLEY 6221 Current source
• KEITHLEY 2182A Nano-volt meter
• TESTO 645 Humidity/temperature tester
• LINKAM LNP95 with several Testing stages
• SPEAG DAK Dielectric assessment kits
• POSITEST AT-T Adhesion tester
• QWED Split Post Dielectric Resonators (SPDR)
• AIXACT TF analyzer 2000 with FE module
• Brüel & Kjær Vibrator, Mini-Shaker 4810
• APC d33 tester meter
• FESTO Customized programmable step force simulator
• HVPZT Amplifiers
• POLYTEC Laser doppler vibrometer
• Michelson Interferometer (profilometer, measuring system of piezocoefficients)
• ARCTEST ARC-150 Environmental test chamber
• APD Closed system cryostat
• ESPEC SU-261 temperature chamber
• ESPEC BTZ-175E temperature chamber

Cell culture laboratory facilities

• KOJAIR Biowizard Platinum Cell culture hood
• HERAEAUS HERAcell VIOS 160i CO2 incubator
• THERMO SCIENTIFIC BioCane 20 Cell storage
• NANOENTEK Eve Automated cell counter
• ZEISS PrimoVert Inverted microscope
• LEICA DM4B with DAPI, GFP and Y3 filters Fluorescence microscope
• VWR UNO96 gradient thermocycler
• VWR PerfectBlue, Horizontal gel electrophoresis system
• TUTNAUER 2840ELCG-D Autoclave
• VWR Mega STAR 600 Centrifuge

Kilpijärvi, Joni (2021) RF-microwave sensor development for cell and human in vitro and ex vivo monitoring

Joseph, Nina (2019) CuMoO4 : a microwave dielectric and thermochromic ceramic with ultra-low fabrication temperature

Pitkänen, Olli (2019) On-device synthesis of customized carbon nanotube structures

Varghese, Jobin (2019) MoO3, PZ29 and TiO2 based ultra-low fabrication temperature glass-ceramics for future microelectronic devices

Tolvanen, Jarkko (2018) Novel sensor and switch applications for flexible and stretchable electronic materials

Hajimammadov, Rashad (2018) Plasmonic, electrical and catalytic properties of one-dimensional copper nanowires : effect of native oxides

Asres, Georgies Alene (2018) Synthesis, characterization and application of WS₂ nanowire-nanoflake hybrid nanostructures

Palosaari, Jaakko (2017) Energy harvesting from walking using piezoelectric cymbal and diaphragm type structures

Chen, Mei-Yu (2017) Ultra-low sintering temperature glass ceramic compositions based on bismuth-zinc borosilicate glass

Kähäri, Hanna (2016) A room-temperature fabrication method for microwave dielectric Li₂MoO₄ ceramics and their applicability for antennas

Rautio, Anne-Riikka (2016) On the stability of carbon nanotube and titania nanowire based catalyst materials : from synthesis to applications

Nelo, Mikko (2015) Inks based on inorganic nanomaterials for printed electronics applications

Leinonen, Mikko (2015) Finite element method and equivalent circuit based design of piezoelectric actuators and energy harvester dynamics

Lin, Jhih-Fong (2015) Multi-dimensional carbonaceous composites for electrode applications

Putaala, Jussi (2015) Reliability and prognostic monitoring methods of electronics interconnections in advanced SMD applications

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Post-graduate education aiming at a doctoral degree is provided within the framework of the University of Oulu Graduate School. Microelectronics Research Unit also participates in the Advanced Materials Doctoral Programme - ADMA-DP and in the Infotech Oulu Graduate School.

Erkki-Koiso Kanttilankatu 3, Linnanmaa, Oulu

Research unit premises are in the Tietotalo (entrance E) on floors 2 and 3.

Map of Linnanmaa Campus

Microelectronics Research Unit

P.O. Box 4500

90014 University of Oulu

Finland